PREVAC | Technology for science and industry 11.11.2026 00:44
4-6 axes LHe manipulators (open cycle)
Spectroscopy UHV manipulators with heating and LHe cooling (open cycle) possibility.
It is a highly precise and highly rigid UHV specimen manipulator with modular construction, suitable for a range of X, Y, Z linear motions and R1, R2, R3 rotations. Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules.
Technical data
| Standard base flange | DN 100CF or DN 160CF |
| Pressure range | down to 10-11 mbar |
| Heating methods | resistive, EB, direct |
| Cooling method | LHe |
| XY range | ± 9 mm – for base flange DN 100CF ± 12.5 mm – for base flange DN 160CF |
| positional control | micrometer/motorised* |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Z range | up to 600 mm |
| positional control | handwheel/motorised* |
| resolution (manual/motorised) | 1 mm / standard 10 μm (1 μm on request) |
| R1 range | ± 180° or ± 360° |
| positional control | rotary feedthrough/motorised* |
| resolution (motorised) | 0.1° |
| R2 range | 360° continuous |
| positional control | motorised* |
| resolution (motorised) | 0.1° |
| R3 range | – 20° to +40° |
| positional control | rotary feedthrough/motorised* |
| resolution (motorised) | 0.1° |
| Bakeout temperature | up to 150 °C |
* stepper motor or servomotor – depending on the application.
The manipulator can be prepared for customer motors or drivers – on request.
Options
- Full motorisation
- Full software control
- Helium recovery system
- Possibility to mount an angular device for PES calibration
- Temperature stabilisation
- Heating option: direct, resistive or EB
Heating/cooling
Sample temperature depend on sample holder type:
- direct heating with 10 A,
- resistive heating up to 1100 °C,
- EB heating up to 1400 °,
- liquid helium cooling:
– 4 axes manipulator – down to 4 K*
– 5 axes manipulator – down to 4.8 K* / 10 K**
– 6 axes manipulator – down to 7 K* / 15 K**
* parameters achieved without heating option and temperature stabilisation
** parameters achieved with heating option
Gallery
