4-6 axes LHe manipulators (open cycle)

6-axes LHe OC manipulator
6-axes LHe OC manipulator
5-axes LHe OC manipulator
Receiving station for Flag style sample holders
4-axes LHe OC manipulator (with second heating stage)
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4-6 axes LHe manipulators (open cycle)

Spectroscopy UHV manipulators with heating and LHe cooling (open cycle) possibility.

It is a highly precise and highly rigid UHV specimen manipulator with modular construction, suitable for a range of X, Y, Z linear motions and R1, R2, R3 rotations. Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules.

SKU: 374 Category:

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LHe
XY range ± 9 mm – for base flange DN 100CF
± 12.5 mm – for base flange DN 160CF
   positional control micrometer/motorised*
   resolution (manual/motorised) 5 μm / 1 μm
Z range up to 600 mm
   positional control handwheel/motorised*
   resolution (manual/motorised) 1 mm / standard 10 μm (1 μm on request)
R1 range ± 180° or ± 360°
   positional control rotary feedthrough/motorised*
   resolution (motorised) 0.1°
R2 range 360° continuous
   positional control motorised*
   resolution (motorised) 0.1°
R3 range – 20° to +40°
   positional control rotary feedthrough/motorised*
   resolution (motorised) 0.1°
Bakeout temperature up to 150 °C

* stepper motor or servomotor – depending on the application.
The manipulator can be prepared for customer motors or drivers – on request.

Options

  • Full motorisation
  • Full software control
  • Helium recovery system
  • Possibility to mount an angular device for PES calibration
  • Temperature stabilisation
  • Heating option: direct, resistive or EB

Heating/cooling

Sample temperature depend on sample holder type:

  • direct heating with 10 A,
  • resistive heating up to 1100 °C,
  • EB heating up to 1400 °,
  • liquid helium cooling:
    – 4 axes manipulator – down to 4 K*
    – 5 axes manipulator – down to 4.8 K* / 10 K**
    – 6 axes manipulator – down to 7 K* / 15 K**

* parameters achieved without heating option and temperature stabilisation
** parameters achieved with heating option

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