4-5 axes LN<sub>2</sub> manipulators
The 4-5* axes LN2 manipulator with X, Y, Z, R1, and R2 axes is a high precision, high rigidity, UHV sample manipulator of modular construction, with the possibility of cooling with liquid nitrogen, and heating.
Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. All axes of the manipulator are motorised by stepper motors or servomotors. The X, Y, and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5 axes manipulator is a combination of XY stage, Z slide and rotation stages.
* 6 axes manipulator for PTS sample holders is available on request.
Technical data
| Standard base flange | DN 100CF or DN 160CF |
| Pressure range | down to 10-11 mbar |
| Heating methods | resistive, EB, direct |
| Cooling method | LN2 |
| XY range | ± 12.5 mm |
| positional control | micrometer/motorised* |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Z range | 75 – 800 mm (other on request) |
| positional control | handwheel/motorised* |
| resolution (manual/motorised) | 50 μm / standard 10 μm (1 μm on request) |
| R1 range | ± 180° |
| positional control | rotary feedthrough/motorised* |
| resolution (manual/motorised) | 1°/0.1° |
| R2 range | 360° continuous / ±90° |
| positional control | motorised |
| resolution (motorised) | 0.1° |
| Bakeout temperature | up to 150 °C |
* stepper motor or servomotor – depending on the application.
The manipulator can be prepared for customer motors or drivers – on request.
Options
- Full motorisation
- Full software control
- Temperature stabilisation
- Heating options: direct, resistive or EB
- Heaters suitable for reactive gases (resistive heating)
Additional info
The multi-axis manipulators are configured with a sample receiving station that can accept one of the PTS range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000 V, 2 x heating current up to 20 A) and sapphire ball cooling contact for liquid nitrogen cooling.
The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1 and R2 axes.
Gallery
