4-5 axes LN2 manipulators

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4-5 axes LN2 manipulators

The 4-5* axes LN2 manipulator with X, Y, Z, R1, and R2 axes is a high precision, high rigidity, UHV sample manipulator of modular construction, with the possibility of cooling with liquid nitrogen, and heating.

Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. All axes of the manipulator are motorised by stepper motors or servomotors. The X, Y, and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5 axes manipulator is a combination of XY stage, Z slide and rotation stages.

* 6 axes manipulator for PTS sample holders is available on request.

SKU: 373 Category:

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LN2
XY range ± 12.5 mm
   positional control micrometer/motorised*
   resolution (manual/motorised) 5 μm / 1 μm
Z range 75 – 800 mm (other on request)
   positional control handwheel/motorised*
   resolution (manual/motorised) 50 μm / standard 10 μm (1 μm on request)
R1 range ± 180°
   positional control rotary feedthrough/motorised*
   resolution (manual/motorised) 1°/0.1°
R2 range 360° continuous / ±90°
   positional control motorised
   resolution (motorised) 0.1°
Bakeout temperature up to 150 °C

* stepper motor or servomotor – depending on the application.
The manipulator can be prepared for customer motors or drivers – on request.

Options

  • Full motorisation
  • Full software control
  • Temperature stabilisation
  • Heating options: direct, resistive or EB
  • Heaters suitable for reactive gases (resistive heating)

Additional info

The multi-axis manipulators are configured with a sample receiving station that can accept one of the PTS range of sample holders. The station is equipped with 6 electrical contacts (2 x thermocouple type K, C or E; 2 x sample bias up to 1000 V, 2 x heating current up to 20 A) and sapphire ball cooling contact for liquid nitrogen cooling.

The manipulator includes all of the necessary electrical, gas and mechanical feedthroughs together with stepper motor and stepper motor driver for the XY, Z, R1 and R2 axes.

 

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