PREVAC | Technology for science and industry 14.11.2026 00:55
Ion beam etching systems
UHV system for sample surface ion etching with high homogeneity. Recommended for sample preparation for characterisation techniques (e.g. TEM).
Features
- Full motorised 2-axes manipulator with fast operation automatic shutter and with integrated Faraday cup
- Manipulator with an efficient water cooling system to guarantee required temperature stabilization during the process
- Wide range of plate style sample holder types up to 6” size
- Ready for gridless / gridded, RF / DC ion sources
- Dedicated software and HMI device for controlling and monitoring the process and all components
- Internal protective liner/shield
- Bottom flange for e.g. electron beam evaporators
- Design is easy to extend with transferring system
- Front opening door for easy access to the process chamber