Features

• Full motorised 2-axes manipulator with fast operation automatic shutter and with integrated Faraday cup
• Manipulator with an efficient water cooling system to guarantee required temperature stabilization during the process
• Wide range of plate style sample holder types up to 6” size
• Ready for gridless / gridded, RF / DC ion sources
• Dedicated software and HMI device for controlling and monitoring the process and all components
• Internal protective liner/shield
• Bottom flange for e.g. electron beam evaporators
• Design is easy to extend with transferring system
• Front opening door for easy access to the process chamber