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Ion beam etching systems

UHV system for sample surface ion etching with high homogeneity. Recommended for sample preparation for characterisation techniques (e.g. TEM).

SKU: 466 Category:


  • Full motorised 2-axes manipulator with fast operation automatic shutter and with integrated Faraday cup
  • Manipulator with an efficient water cooling system to guarantee required temperature stabilization during the process
  • Wide range of plate style sample holder types up to 6” size
  • Ready for gridless / gridded, RF / DC ion sources
  • Dedicated software and HMI device for controlling and monitoring the process and all components
  • Internal protective liner/shield
  • Bottom flange for e.g. electron beam evaporators
  • Design is easy to extend with transferring system
  • Front opening door for easy access to the process chamber
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