Ion beam etching systems

UHV system for sample surface ion etching with high homogeneity. Recommended for sample preparation for characterisation techniques (e.g. TEM).

SKU: 466 Category: Ion beam etching systems

Features

Full motorised 2-axes manipulator with fast operation automatic shutter and with integrated Faraday cup
Manipulator with an efficient water cooling system to guarantee required temperature stabilization during the process
Wide range of plate style sample holder types up to 6” size
Ready for gridless / gridded, RF / DC ion sources
Dedicated software and HMI device for controlling and monitoring the process and all components
Internal protective liner/shield
Bottom flange for e.g. electron beam evaporators
Design is easy to extend with transferring system
Front opening door for easy access to the process chamber