2-5 axes PLD targets manipulators
The 2-5 axes motorised PLD target manipulator is designed for pulsed laser deposition applications under ultra-high vacuum conditions.
It is a high precision, high rigidity, UHV specimen manipulator with revolver mechanism up to 6 target holders.The manipulator can work in vertical or horizontal orientation, depends on PLD process geometry.
Description
The target manipulator has two axes of rotation: R1 and R2. By changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator has an additional hole/position (between two targets) to accommodate a laser power meter. The XY motion module allows scanning of the target via a laser beam. One axis is motorised – for scanning, second is manual – for adjusting. An additional Z axis is used to set up the transfer position for target transferring via the Load Lock Chamber. The Z movement can be motorised or manual. The computer controls the target rotation and radial scanning over the complete target diameter (fixed laser beam) for making multi-layer deposition with maximum target usage.
▪ Targets holder: PTS
▪ Base pressure: 10-10 mbar
▪ Possibility of fixing targets with irregular shapes
▪ Target sizes: 1″ or 2″, standard target thickness: 0.5 – 10 mm
▪ Continuous, individual rotation of targets
▪ Select and sequence change of targets
▪ Shield against mutual pollution of targets
▪ Radial scan, automatic control
▪ Target is mounted coaxially (relative to the substrate) and positioned so as to eliminate the likelihood of droplets, clusters settling on the substrate and the effects of possible target peeling
▪ Target holders are transferable to the load-lock chamber (or storage) for quick replacement
▪ Water cooling system
Technical data
| Standard base flange | DN 100CF or DN 200CF |
| Base pressure range | 10-10 mbar |
| Shutter | integrated, pneumatic |
| Cooling method | H20 |
| R2 range | 360° continuous |
| positional control | motorised* |
| resolution (motorised) | 0.1° |
| Z range | 50 mm (other on request) |
| positional control | handwheel |
| resolution (manual/motorised) | 500 μm / standard 10 μm (1 μm on request) |
| XY range (option) |
± 12.5 mm |
| positional control | micrometer/motorised* |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Max speed | up to 50 rpm (other on request) |
| Bakeout temperature | up to 150 °C |
* stepper motor or servomotor – depend on application.
Manipulator can be prepared for customer motors or drivers – on request.
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