Description
The target manipulator has two axes of rotation: R1 and R2. By changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator has an additional hole/position (between two targets) to accommodate a laser power meter. The XY motion module allows scanning of the target via a laser beam. One axis is motorised – for scanning, second is manual – for adjusting. An additional Z axis is used to set up the transfer position for target transferring via the Load Lock Chamber. The Z movement can be motorised or manual. The computer controls the target rotation and radial scanning over the complete target diameter (fixed laser beam) for making multi-layer deposition with maximum target usage.
▪ Targets holder: PTS
▪ Base pressure: 10-10 mbar
▪ Possibility of fixing targets with irregular shapes
▪ Target sizes: 1″ or 2″, standard target thickness: 0.5 – 10 mm
▪ Continuous, individual rotation of targets
▪ Select and sequence change of targets
▪ Shield against mutual pollution of targets
▪ Radial scan, automatic control
▪ Target is mounted coaxially (relative to the substrate) and positioned so as to eliminate the likelihood of droplets, clusters settling on the substrate and the effects of possible target peeling
▪ Target holders are transferable to the load-lock chamber (or storage) for quick replacement
▪ Water cooling system
