Radial distribution systems
Designed to transfer samples between multiple analysis, deposition or preparation chambers that are connected to it.
The chambers are normally mounted at the centre of a series of chambers, acting as a central distribution hub for cluster tools. The transportation and rotating mechanism of the RDC chamber provides repeatable and accurate sample transfer to other chambers. The radial distribution chamber mechanism is a development of the linear rack-and-pinion transporter, where a single-ended rack-and-pinion is precisely rotated by a precision rotary drive until it is aligned in a preset position at a radial port. Once locked into position, the same rotary drive transfers the rack out through the port.
Technical data
| Travelling flange | DN 63CF – DN 160CF |
| Viewport flange | DN 160CF |
| Chamber diameter | 550 – 1200 mm (other on request) |
| Max transfer length Z | 395 – 904, depends on chamber diameter, transferring arm and sample holder type (other on request) |
| Positional control | manual / semi-motorised (option) / motorised (option) |
| Bakeout temperature | up to 150°C |
Transfer Length
| Chamber diameter D [mm] | Maximum transfer length Z [mm] | |
| for PTS (1″) sample holders | for flag style sample holders | |
| 550 telescopic | 555 | 572 |
| 700 telescopic | 780 | 797 |
| 700 | 395 | 414 |
| 750 | 444 | 463 |
| 800 | 493 | 512 |
| 900 | 591 | 610 |
| 1000 | 689 | 708 |
| 1200 | 885 | 904 |
Features
• Standard or telescopic transferring arm
• By rotating only one rotary feedthrough you can move the transfer arm in and out, rotate the sample holder around the arm axis, rotate the mechanism between transfer ports and lock/unlock the sample holder.
• Chamber body diameters from 550 to 1200 mm (can be customized)
• Configured with TSP and transfer mechanism with rack-and-pinion rotary motion feedthrough
• Time to transfer between two chambers < 45 sec. (manual mode) – fast transfer time allows cold samples to stay cold (temperature rise also depends on initial temperature and heat capacity)
• Fast & reliable drop-proof transfer of hot & cold samples
• Up to 8 transfer positions to other UHV chambers with automatic sample positioning
• Guaranteed base pressure: 10-11 mbar range after 48h of bakeout. 10-10 mbar during transferring
• Numerous viewports
• Equipped with additional ports with UHV connecting flanges for future versatility
• Can be equipped with application matched vacuum pumps to achieve the best pressure range (e.g. turbo, ion, getter or titanium sublimation pumps)
Options
- R1 axis rotation (90° left, 90° right, 180°). Rotation is independent for each port.
- Sample holders – RDC design allows transferring a wide range of various sample holders:
– PTS, Flag Style, Plate Style, Puck Style or special design holders up to 12”,
– with heating by direct, indirect or e-beam methods up to 2000°C,
– with high cooling efficiency down to 4.8 K (LHe),
– dedicated for e.g. quartz balance, Faraday cup, high-pressure reactors, powder materials, IR spectroscopy and many others.
Gallery
