4-6 axes LHe manipulators (closed cycle)
The manipulator with helium cryostat is a versatile, closed-cycle system that applies in many UHV surface science researches.
It can be configured with Z slide, XY stage, or differentially pumped rotary feedthrough. Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. The system typically includes a compressor, high-pressure hoses, an expander, a temperature controller, a heater and a sensor.
Technical data
| Standard base flange | DN 100CF or DN 160CF |
| Pressure range | 1 bar to 10-11 mbar |
| Heating methods | resistive, EB, direct |
| Cooling method | LHe |
| XY range | ± 12.5 mm* |
| positional control | micrometer/motorised** |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Z range | up to 300 mm |
| positional control | handwheel/motorised** |
| resolution (manual/motorised) | 50 μm / standard 10 μm (1 μm on request) |
| R1 range | ± 180° |
| positional control | rotary feedthrough/motorised** |
| resolution (motorised) | 0.1° |
| R2 range | 360° continuous |
| positional control | motorised** |
| resolution (motorised) | 0.1° |
| R3 range | – 20° to +40° |
| positional control | rotary feedthrough/motorised** |
| resolution (motorised) | 0.1° |
| Bakeout temperature | up to 150 °C |
* for base flange DN 160CF
** stepper motor or servomotor – depends on the application.
The manipulator can be prepared for customer motors or drivers – on request.
Options
- Full motorisation
- Full software control
- Helium recovery system
- Possibility to mount an angular device for PES calibration
- Additional electrical contacts for silicon sample direct heating
- Low vibration cryostat
- Temperature stabilisation
- Heating option: direct, resistive or EB
Heating/cooling
Sample temperature depends on sample holder type:
- EB heating – up to 1000 °C (second stage),
- direct heating with 10 A,
- resistive heating (on request),
- liquid helium cooling:
– below 10 K* (5-axes manipulator)
* parameters achieved without stabilisation and without heating option
Gallery
