4-6 axes LHe manipulators (closed cycle)

5-axes LHe CC manipulator
5-axes LHe CC manipulator (with Z chain slide)
5-axes LHe CC manipulator (with second heating stage)
Receiving station for Flag style sample holders
Receiving station for Flag holders, with second heating stage
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4-6 axes LHe manipulators (closed cycle)

The manipulator with helium cryostat is a versatile, closed-cycle system that applies in many UHV surface science researches.

It can be configured with Z slide, XY stage, or differentially pumped rotary feedthrough. Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. The system typically includes a compressor, high-pressure hoses, an expander, a temperature controller, a heater and a sensor.

SKU: 375 Category:

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range 1 bar to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LHe
XY range ± 12.5 mm*
   positional control micrometer/motorised**
   resolution (manual/motorised) 5 μm / 1 μm
Z range up to 300 mm
   positional control handwheel/motorised**
   resolution (manual/motorised) 50 μm / standard 10 μm (1 μm on request)
R1 range ± 180°
   positional control rotary feedthrough/motorised**
   resolution (motorised) 0.1°
R2 range 360° continuous
   positional control motorised**
   resolution (motorised) 0.1°
R3 range – 20° to +40°
   positional control rotary feedthrough/motorised**
   resolution (motorised) 0.1°
Bakeout temperature up to 150 °C

* for base flange DN 160CF
** stepper motor or servomotor – depends on the application.
The manipulator can be prepared for customer motors or drivers – on request.

Options

  • Full motorisation
  • Full software control
  • Helium recovery system
  • Possibility to mount an angular device for PES calibration
  • Additional electrical contacts for silicon sample direct heating
  • Low vibration cryostat
  • Temperature stabilisation
  • Heating option: direct, resistive or EB

Heating/cooling

Sample temperature depends on sample holder type:

  • EB heating – up to 1000 °C (second stage),
  • direct heating with 10 A,
  • resistive heating (on request),
  • liquid helium cooling:
    – below 10 K* (5-axes manipulator)

* parameters achieved without stabilisation and without heating option

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