1‑axis Z UHV 8″ RF/DC BIAS Manipulator

The 1‑axes UHV Plate Style Manipulator is a device of high precision, high rigidity, modular construction, suitable of Z axes of motions compatible with Plate Style sample holder and intended for operation in ultra‑high vacuum (UHV).

The manipulator has the following functions:
• changing the position of the holder in relation to the fixed mounting flange,
• working with the Plate Style holder transferring system,
• RF/DC biasing.

We can provide this manipulator in sample sizes ranging from 2 to 12 inches.