Technical data
| Mounting flange | DN 300CF |
| Z motion | motorized; 100mm , resolution 10µm |
| Biasing | RF/DC BIAS |
| Resistive heating | Plate Style |
| Position of work | vertical |
| Bakeout temperature | up to 150°C |
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1‑axis Z UHV 8″ RF/DC BIAS Manipulator
The 1‑axes UHV Plate Style Manipulator is a device of high precision, high rigidity, modular construction, suitable of Z axes of motions compatible with Plate Style sample holder and intended for operation in ultra‑high vacuum (UHV).
- The manipulator has the following functions:
- changing the position of the holder in relation to the fixed mounting flange,
- working with the Plate Style holder transferring system,
- RF/DC biasing.
We can provide this manipulator in sample sizes ranging from 2 to 12 inches.
