Specification
Our lab operates on Filmetrics’ Profilm3D, which uses industry-standard white light interferometry (WLI) and optional phase shift interferometry (PSI). The equipment includes software for image stitching and active tabletop vibration isolation systems.
• Thickness range, WLI: 50 nm – 10 mm
• Thickness range, PSI: 0 – 3 μm
• Z- axis range: 37 mm
• X-Y stage range: 100 mm by 100 mm
• Motorised stage
