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Optical profilometer measurements

The optical profilometer is used for non-contact measurement of height differences, roughness and surface mapping. A variety of materials: metals, plastics, and ceramics (except glass) can be measured.



Our lab operates on Filmetrics’ Profilm3D, which uses industry-standard white light interferometry (WLI) and optional phase shift interferometry (PSI). The equipment includes software for image stitching and active tabletop vibration isolation systems.

• Thickness range, WLI: 50 nm – 10 mm
• Thickness range, PSI: 0 – 3 μm
• Z- axis range: 37 mm
• X-Y stage range: 100 mm by 100 mm
Motorised stage

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