Author: Dong Han, Mohamed Bouras, Claude Botella, Aziz Benamrouche, Bruno Canut, Geneviève Grenet, Guillaume Saint-Girons, and Romain Bachelet
Institute: Institut des Nanotechnologies de Lyon—INL CNRS UMR 5270, Université de Lyon, Ecole Centrale de Lyon / INSA de Lyon
Journal: Journal of Vacuum Science & Technology A 37, 021512 (2019)