Author: Dong Han, Mohamed Bouras, Claude Botella, Aziz Benamrouche, Bruno Canut, Geneviève Grenet, Guillaume Saint-Girons, and Romain Bachelet

Institute: Institut des Nanotechnologies de Lyon—INL CNRS UMR 5270, Université de Lyon, Ecole Centrale de Lyon / INSA de Lyon

Journal: Journal of Vacuum Science & Technology A 37, 021512 (2019)

No.: https://doi.org/10.1116/1.5082185

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