Ready to travel? 

So is your sample.

Keep every transfer under UHV.

Your sample spent weeks getting ready. The last thing it needs is a lungful of air on the way to the next instrument.

Keeping samples under vacuum across instruments is at the heart of every UHV workflow. PREVAC designs complete transfer solutions that protect your samples from preparation to analysis.

Transport Boxes for various types of sample holder

Transport boxes are designed for transporting samples between different UHV systems under ultra high vacuum conditions. 

Sample holders can be stored and transported inside the transport box while maintaining UHV conditions. Vacuum is ensured by an vacuum pump and it’s monitored by appropriate pressure gauge.

Linear transfers are now available for sample sizes of 8–12″

Our linear transfers move samples in and out of chambers with smooth, precise, repeatable motion. 

The big news: designed for 8–12″ substrates, opening up larger geometries and more flexible platform layouts.

Distribution Chamber for 12″ wafers: connect all your process chambers in one cluster

The Radial Distribution Chamber — the UFO — sits at the heart of a multi-chamber system and routes samples between preparation, deposition and analysis, all under UHV. Every chamber connects to it; nothing has to break vacuum to move from one to the next.

Interested?

Our team is ready to help you find the right configuration for your application.

Contact us directly:

prevac@prevac.eu