Description
There are two types of linear transfers available:
• 1 axis – with forward movement only,
• 2 axes – with forward movement and continuous rotation around the movement axis.
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Transfer for 2-inch samples
Designed to transport sample holders/samples between chambers under UHV conditions.
They are commonly used to transfer samples from load lock chambers to UHV system main chambers. The linear transfers are pumped by the research platform pumping system or else with a dedicated pump set. The entire movement range of the transfer mechanism is via rotary motion feedthrough. The range of the transfer movement is from 450 to 1600 mm.
Technical data
| Travelling flange | DN 100CF |
| Max transfer length | 320 – 1600 mm, depends on chamber length and sample holder type (other on request) |
| Positional control | manual / motorised (option) |
| Bakeout temperature | up to 150°C |
Two-sided solution
Two sided linear transfer allows for transferring through linear transfer chamber in both directions. Chamber can be equipped with additional ports for connecting e.g. pump.
The range of the transfer movement is from 500 to 2000 mm.
