Description
Load locks may be positioned at various places on the UHV system, such as direct connection to the radial distribution chamber, linear transfer line or glovebox.
Our standard range of load lock chambers are suitable for most positions and most applications but we will also be happy to fabricate to your individual specifications.
Load lock chambers are typically equipped with:
• Load lock chamber mechanism
• Pump system
• Viewports
• Pressure gauges
The top port of the load lock chamber mechanism is usually sealed by a viton gasket. The chambers are equipped with UHV connecting flanges and additional ports for future versatility. They are designed for base pressures between 1×10-7 mbar and 1×10-9 mbar. A range of options are available, e.g. LN2 cooling or heating samples up to 600 °C.
