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Magnetron power supply M600DC-PS

Compact switch-mode power supply designed to drive up to 3 magnetron sources, with support for thickness and evaporation rate measurements, vacuum measurements and mass flow controller.


All adjustable parameters are displayed on the large TFT display with touchscreen. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on.  The unit also features a built in timer and automatic standby mode. It is fully interlocked for both, user and device safety. Unit can be remotely controlled via one of available  analog or digital interfaces.


  • Easy to extend power up to 1200 W/1800 W/2400 W with additional modules
  • Switch mode for 3 magnetron sources with shutters control
  • Adjustable limits of voltage, current and power separately for each output
  • Multiple I/O – individual programmable
  • Arc detection system
  • 2D real time chart module

Support for:

  • Thickness and evaporation rate measurements
  • Vacuum measurements
  • Mass Flow Controller

Technical data

Supply voltage 100 – 240 V, 50/60 Hz
Output voltage up to 1200 V (from 50 V)
Output current up to 1200 mA* (from 1 mA)
Output power up to 600 W** (from 1 W)
Switch mode 3 outputs for magnetrons
Analog inputs/outputs 3 (0-10V)/3 (0-10V)
Digital inputs and outputs individual programmable
Timer dual mode timer 0 s – 99 h 59 m
Thickness and evaporation rate measurements 1 channel for Thickness Monitors TM13/TM14
Vacuum measurement 1 channel for active vacuum gaguges: CTR90, TTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION
Mass Flow Controller 1 channel for MKS KF1
Communication interface RS232/485, Ethernet
Communication protocol MODBUS-TCP/RTU
User Interface 5” TFT display with touchscreen, digital encoder
Interface languages English, German, Polish
Dimensions 242 x 87 x 450 mm (W x H x D), 2U 42HP
Weight (approx.) 6 kg

* easy to extend with additional modules, up to: 2,4 A/3,6 A/4,8 A
** easy to extend with additional modules, up to: 1200 W/1800 W/2400 W


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