Provides short strokes of Z travel with a wide range of bellows I.D.
The slide is provided through three lead screws which are synchronously driven by a drive chain. Manual operation is provided by a handwheel assembly operating through a wormdrive reduction system. Z chain slides are often integrated with an XY stage. The unit is intended primarily for vertical operation with the load supported on the Z axis. For alternative orientations please contact our technical department. The Z chain slide can be motorised with the stepper motor shift.
| Base flange | DN 100CF or DN 160CF* |
| Travelling flange | DN 100CF or DN 100CF* |
| Z range | 100 – 300 mm |
| Z motion control | handwheel / stepper motor (option) |
| resolution (manual/motorised) | 50 μm / standard 10 μm (1 μm on request) |
| Bakeout temperature | up to 150 °C |
| Compressed length [mm] Extended length [mm] |
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| Z range [mm] | Bellow ID102 DN 100/100CF |
Bellow ID156 DN 160/160CF |
| 100 | 104.5 204.5 |
96 196 |
| 200 | 125 325 |
122.5 322.5 |
| 300 | 141 441 |
150 450 |
he Z chain slides are heavy duty translators designed to move heavy objects accurately in and out of the vacuum system. They are well suited to applications involving equipment insertion and withdrawal from points where space is restricted.
