UHV transfer mechanism fabricated from a pair of flanges, connected by an edge welded bellows.
The free flange moves towards the fixed flange in a controlled, precise motion whilst maintaining parallelism. Its action is similar to the Z slide manipulator, but with slightly reduced travel length and overall positioning resolution. The standard mounting flange is DN 40CF or DN 63CF. The shift is actuated by a handwheel and can work in any orientation.
The linear shifts are designed for the linear movement of instruments with minimum tilt or wobble in the movement, maintaining precision alignment before and after the pump-down.
| Base flange | DN 40CF or DN 63CF |
| Travelling flange | DN 40CF |
| Z range | 25, 50, 75, 100 of 150 mm |
| Bellows ID | 38.5 mm |
| Positional control | handwheel / motorisation (option) |
| Resolution | 1 mm |
| Repeatability | 1 mm |
| Tilt range (for LS with tilt) | ± 4° |
| Bakeout temperature | up to 150 °C |
|
Compressed length [mm] |
|||||||
| Z range [mm] | standard | high stability | with tilt | ||||
| DN 40/40CF | DN 63/40CF | DN 40/40CF double guided bellow |
DN 40/40CF | DN 63/40 CF | DN 40/40CF | DN 63/40CF | |
| 25 | 45 70 |
47.5 72.5 |
– – |
– – |
47.5 72.5 |
– – |
– – |
| 50 | 51 101 |
55 105 |
– – |
– – |
60.7 110.7 |
– – |
– – |
| 75 | 53 128 |
60 135 |
– – |
54.3 129.3 |
– – |
65 140 |
– – |
| 100 | 65 165 |
69 169 |
– – |
65 165 |
69 169 |
66 166 |
55 157 |
| 150 | – – |
– – |
80 230 |
– – |
– – |
– – |
– – |
The linear shifts are used in applications that don’t require the higher precision and graduated movement of other linear motion devices. They are usually used for:
