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2‑axes R1R2 UHV 6″ Plate Style Manipulator

The 2‑axes UHV 6″ Plate Style Manipulator is a device of high precision, high rigidity, modular construction, suitable of R1 and R2 axes of motions compatible with Plate Style sample holder and intended for operation in ultra‑high vacuum (UHV).

We can provide this manipulator in sample sizes ranging from 2 to 12 inches.

Technical data

 

 

Mounting flange DN 300CF
R1 motorized; ±180°, resolution 0,1°
R2 motorized; 360°, resolution 0,1°
Sample holder type Plate Style
Position of work horizontal
Bakeout temperature up to 150°C

 

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