Technical data
| Mounting flange | DN 40CF (rotatable) |
| Gases | Ar and reactive gases (O2, H2 hydrocarbons with reduced lifetime) |
| Energy range | 0.15 keV – 5 keV |
| Scan area | 10 mm x 10 mm (for working distance of 23 mm) |
| Current density | up to 4 mA / cm2 (for distance 23 mm) |
| Beam current | > 1 μA (for distance 23 mm) |
| Cathode type | yttrium oxide coated iridium filament |
| Small cone angle | 50° |
| Insertion length | 163 mm (standard), OD: 34 mm |
| FWHM | dependent on working distance (e.g. < 150 μm for distance 23 mm) |
| Typical working distance | 23 – 120 mm |
| Bakeout temperature | 250 °C |
| Working pressure | 10-8 mbar (with max beam current) |
