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Ion source IS 40E1

Ion Source IS 40E1 – two lens, focused, extractor type ion gun. Suitable for depth profiling (Ar), enables operation with reactive gases like O2, H2, hydrocarbons and all noble gases. The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.

SKU: 121 Category:

Technical data

Mounting flange DN 40CF (rotatable)
Gases Ar and reactive gases (O2, H2 hydrocarbons with reduced lifetime)
Energy range 0.15 keV – 5 keV
Scan area 10 mm x 10 mm (for working distance of 23 mm)
Current density up to 4 mA / cm2 (for distance 23 mm)
Beam current > 1 μA (for distance 23 mm)
Cathode type yttrium oxide coated iridium filament
Small cone angle 50°
Insertion length 163 mm (standard), OD: 34 mm
FWHM dependent on working distance
(e.g. < 150 μm for distance 23 mm)
Typical working distance 23 – 120 mm
Bakeout temperature 250 °C
Working pressure 10-8 mbar (with max beam current)


  • Specially configured nose cone
  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • Continuously variable spot size
  • Extremely homogeneous crater/beam profile
  • Onside replaceable filament
  • UHV gas inlet
  • UHV conditions maintained in chamber
  • Integrated scan and deflection unit
  • Correction of incident electron beam angle (provided by IS40-PS power supply)


  • Wien mass filter
  • Gas dosing system
  • Linear shift: 25, 50, 75, 100 mm
  • Pumping set (2 stages)
  • Vacuum Gauges set
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