Ion source IS 40E1

Ion Source IS 40E1 – two lens, focused, extractor type ion gun. Suitable for depth profiling (Ar), enables operation with reactive gases like O₂, H₂, hydrocarbons and all noble gases. The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.

Technical data

Mounting flange	DN 40CF (rotatable)
Gases	Ar and reactive gases (O₂, H₂ hydrocarbons with reduced lifetime)
Energy range	0.15 keV – 5 keV
Scan area	10 mm x 10 mm (for working distance of 23 mm)
Current density	up to 4 mA / cm² (for distance 23 mm)
Beam current	> 1 μA (for distance 23 mm)
Cathode type	yttrium oxide coated iridium filament
Small cone angle	50°
Insertion length	163 mm (standard), OD: 34 mm
FWHM	dependent on working distance (e.g. < 150 μm for distance 23 mm)
Typical working distance	23 – 120 mm
Bakeout temperature	250 °C
Working pressure	10^-8 mbar (with max beam current)

Features

Specially configured nose cone
Operation with inert (Ar) & reactive gases (O₂, H₂, hydrocarbons with reduced lifetime)
Continuously variable spot size
Extremely homogeneous crater/beam profile
Onside replaceable filament
UHV gas inlet
UHV conditions maintained in chamber
Integrated scan and deflection unit
Correction of incident electron beam angle (provided by IS40-PS power supply)