Technical data
| Base flange | DN 63CF or DN 100CF |
| Travelling flange | DN 40CF |
| XY range | ± 12.5 mm |
| resolution | 5 μm |
| Z range | 75 – 100 mm |
| resolution (manual) | 0.5 mm |
| Bakeout temperature | up to 150 °C |
| Compressed / Extended Length | Compressed length [mm] Extended length [mm] |
||
| Z range [mm] | DN 40/40CF bellow ID39 |
DN63/40CF bellow ID39 |
DN100/40CF bellow ID39 |
| 75 | 179 254 |
179 254 |
179 254 |
| 100 | – | 179.5 279.5 |
179.5 279.5 |

