Technical data
Base flange | DN 100CF or DN 160CF* |
Travelling flange | DN 100CF or DN 100CF* |
Z range | 100 – 300 mm |
Z motion control | handwheel / stepper motor (option) |
resolution (manual/motorised) | 50 μm / standard 10 μm (1 μm on request) |
Bakeout temperature | up to 150 °C |