Technical data
| Mounting flange | DN 40CF (rotatable) |
| Energy range | 0 – 5 keV |
| Sample current | up to 100 μA |
| Scan area | 10 mm x 10 mm |
| Shield | Cu or μ-metal |
| Cathode type | thoriated tungsten |
| Insertion length | min. 155.7 mm, (other on request) OD: 33.5 mm (μ-metal), 35 mm (Cu) |
| FWHM | dependent on working distance, min. 120 µm (for distance 56 mm) |
| Working distance | 23 mm – 150 mm (typical 75 mm) |
| Bakeout temperature | up to 250 °C |
| Working pressure | < 5×10-6 mbar |

