Features
• Vacuum Chamber is UHV standard, made of stainless steel
• Pfeiffer HiPace80 turbomolecular pump with a pumping speed of 67 l/s for N2
• EDWARDS Vacuum nXDS6i Scroll Pump forevacuum pump (pumping speed 15,1 m3/h for N2)
• Vacuum fittings
• Safety valve and vent valve all electromagnetic
• VAT Gate valve DN 63CF electro-pneumatic – for turbo-molecular pump
• PCU-16 unit for pumps, valves & pressure gauges control
• Leybold Pirani gauge TTR91N DN 16 KF (5×10-4 mbar – atm) with cables
• Leybold PENINGVAC gauge PTR DN 40 CF (5×10-9 mbar – atm) with cables
• Power safe unit – UPS, for safe closing all valves and swithcing off all devices
• Trolley – movable platform with wheels for easy moving the station