Technical data
| Mounting flange | DN 40 CF (non-rotatable) |
| Bakeout temperature | up to 150 °C |
| Insertion length | 190 mm (other on request), OD: 36.8 mm |
| Mass range | 1 to 300 amu |
| Mass filter | quadrupole |
| Detector type | electron multiplier (EM) |
| Resolution | better than 0.5 amu |
| Sensitivity | 2×10-4 A/Torr (FC), |
| Minimum detectable partial pressure | 5×10-11 Torr (FC), 5×10-14 Torr (EM) |
| Working pressure | < 10-4 Torr to UHV (FC) < 10-6 Torr to UHV (EM) |
