Ion source IS 40C1

Compact, easy-to-use extractor type for sample surface cleaning. The source generates an ion current of >70 μA/cm² (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (between 62.5 mm – 384.5 mm, other on request).

✅ Available immediately

Technical data

Mounting flange	DN 40CF (non-rotatable)
Energy range	0.12 keV – 5 keV
Current density	> 120 μA/cm2 (for distance 30 mm)
Shield	Cu, stainless steel (for reactive gases)
Cathode type	yttrium oxide coated iridium filament
Insertion length	min. 62.5 mm, other on request OD: max. 37 mm
FWHM	dependent on ion energy and working distance (e.g. 3 mm for distance 30 mm)
Typical working distance	30 – 250 mm
Bakeout temperature	up to 250°C
Working pressure	10^-5 – 10^-6 mbar