Technical data
Mounting flange | DN 40CF (non-rotatable) |
Energy range | 0.12 keV – 5 keV |
Current density | > 120 μA/cm2 (for distance 30 mm) |
Shield | Cu, stainless steel (for reactive gases) |
Cathode type | yttrium oxide coated iridium filament |
Insertion length | min. 62.5 mm, other on request OD: max. 37 mm |
FWHM | dependent on ion energy and working distance (e.g. 3 mm for distance 30 mm) |
Typical working distance | 30 – 250 mm |
Bakeout temperature | up to 250°C |
Working pressure | 10-5 – 10-6 mbar |