4-5 axes LN2 manipulators for flag holders

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4-5 axes LN2 manipulators for flag holders

Manipulator with LN2 cooling for flag style sample holders allows for many possibilities of station development in terms of the number of holders, various heating methods, and many useful options. This, combined with a wide range of different flag holder types, makes this manipulator station very versatile.

Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. All axes of the manipulator are motorised by stepper motors or servomotors. The X, Y, and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5* axes manipulator is a combination of XY stage, Z slide and rotation stages.

* 6 axes manipulator for PTS sample holders on request.

SKU: 373-1 Category:

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LN2
XY range ± 12.5 mm
   positional control micrometer/motorised*
   resolution (manual/motorised) 5 μm / 1 μm
Z range 75 – 800 mm (other on request)
   positional control handwheel/motorised*
   resolution (manual/motorised) 500 μm / standard 10 μm (1 μm on request)
R1 range ± 175°
   positional control rotary feedthrough/motorised*
   resolution (motorised) 0.1°
R2 range 360° continuous / ±90°
   positional control motorised
   resolution (motorised) 0.1°
Bakeout temperature up to 150 °C

* stepper motor or servomotor – depend on application.
Manipulator can be prepared for customer motors or drivers – on request.

Options

  • Full motorisation
  • Full software control
  • Temperature stabilisation
  • Heating options: direct, resistive or EB
  • Heaters suitable for reactive gases (resistive heating)

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