Technical data
Mounting flange | DN 40CF (rotatable) |
Heater | W wire (tungsten) |
Temperature range | 250 °C – 1400 °C |
Temperature stability | ± 0.1°C |
Crucible type (option) | PBN, Al2O3, Quartz (other materials on request) |
Crucibles volume | 5cc (other volume on request) |
Evaporated materials | Group III-V MBE all typical materials (e.g. Ga, In, Al, Si, Be, Cu, Ag, Au, CaF2) |
Thermocouple type | type C |
Degassing temp. | 1450 °C |
Water cooling (required) | water flow: > 0.5 l/min, temperature: 15 – 30 °C, max pressure: 6 bar |
Insertion length | min. 115 mm (other on request) OD: 35 mm |
Spot size | Dependent on working distance |
Working distance | 100 – 150 mm |
Bakeout temperature | up to 250 °C |
Working pressure | < 10-5 mbar |