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Page 2
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032 PRIMS
basic MS system
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Low temperature effusion cell EF 40LT1
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Sample heating power supply HEAT3-PS
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Double filament effusion cell EF 40C1DF
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Ion multi gauge controller MG15
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Thickness monitors controller TMC13
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Effusion cell EF 40C1
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Power control unit PCU16
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Thickness monitors TM13 & TM14
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Electron beam evaporator EBV 40A1
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Magnetron source | 2-inch targets
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Magnetron source | 3-inch targets
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Magnetron power supply M600DC-PS
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Electron beam evaporator power supply EBV40A-PS
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Quartz balance QO 40A1
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